大宗气体
| 产品 | 纯度 | 指标 |
| 超纯氦 | 6N | O2+Ar≤0.1；N2≤0.1；CO≤0.1；CO2≤0.1；H2O≤0.2；CH4≤0.1;；Ne≤1； H2≤0.1 |
| 超纯氧 | 6N | Ar≤0.2；N2≤0.1；CO2≤0.1；H2O≤0.5；CH4≤0.1；H2≤0.1 |
| 超纯氩 | 6N | O2≤0.2；N2≤0.5；CO≤0.1；CO2≤0.1；H2O≤0.2；CH4≤0.1；H2≤0.1 |
| 超纯氮 | 6N | O2≤0.1；Ar≤2；CO≤0.1；CO2≤0.1；H2O≤0.5；CH4≤0.1；H2≤0.1 |
| 超纯氢 | 6N | O2+Ar≤0.2；N2≤0.4；CO≤0.1；CO2≤0.1；H2O≤0.5；CH4≤0.2 |